SOI-MEMS Bulk Piezoresistive Displacement Sensor: A Comparative Study of Readout Circuits
نویسندگان
چکیده
منابع مشابه
New Design of Mems piezoresistive pressure sensor
The electromechanical analysis of a piezoresistive pressure microsensor with a square-shaped diaphragm for low-pressure biomedical applications is presented. This analysis is developed through a novel model and a finite element method (FEM) model. A microsensor with a diaphragm 1000 „m length and with thickness=400 µm is studied. The electric response of this microsensor is obtained with applyi...
متن کاملA Piezoresistive MEMS Sensor for Acoustic Noise Measurements
A MEMS piezoresistive acoustic sensor has been developed for measurement of jet screech noise. The new sensor was calibrated in the sound field of an air siren. Two sensors with a size of 510 and 710 pm were tested and compared to commercial sensors. The results show that the MEMS sensors are five to eight times more sensitive than the smallest commercially available piezoresistive sensors. Fur...
متن کاملSensitivity Analysis of MEMS Based Piezoresistive Sensor Using COMSOL Multiphysics
The present paper peruses MEMS based piezoresistive pressure sensor and its fabrication techniques. Simulation of the pressure sensor is done by using COMSOL Multiphysics software for P-type silicon piezoresistor. The deflection of N-type silicon diaphragm depends upon the Young’s modulus of the material and varies with the amount of force applied to the diaphragm. The simulation result emphasi...
متن کاملDesign of the MEMS Piezoresistive Electronic Heart Sound Sensor
This paper proposes the electronic heart sound sensor, based on the piezoresistive principle and MEMS (Micro-Electro-Mechanical System) technology. Firstly, according to the characteristics of heart sound detection, the double-beam-block microstructure has been proposed, and the theoretical analysis and finite element method (FEM) simulation have been carried out. Combined with the natural freq...
متن کاملHigh-Performance Piezoresistive MEMS Strain Sensor with Low Thermal Sensitivity
This paper presents the experimental evaluation of a new piezoresistive MEMS strain sensor. Geometric characteristics of the sensor silicon carrier have been employed to improve the sensor sensitivity. Surface features or trenches have been introduced in the vicinity of the sensing elements. These features create stress concentration regions (SCRs) and as a result, the strain/stress field was a...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 2020
ISSN: 1057-7157,1941-0158
DOI: 10.1109/jmems.2019.2952547